Professional production supplier of
ultra-high purity hydrogen peroxide
ultra-high purity hydrogen peroxide
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Product standard: Chemical industry standard "High purity Industrial Product Hydrogen peroxide" HG/T 5736-2020
| No. | Item | Specification | |||||
| HP | UP | ||||||
| HP-1 | HP-2 | UP-1 | UP-2 | UP-3 | UP-4 | ||
| 1 |
Content（H2O2%），W/% |
30-35 |
30-35 |
30-32 |
30-32 | 30-32 |
30-32 |
| 2 |
Chrominance（Hazen），≤ |
- |
- |
10 |
10 | 10 |
10 |
| 3 |
Free acid（H2SO4），ppm ≤ |
30 |
30 |
30 |
30 | 10 |
10 |
| 4 |
Total organic carbon（TOC），ppm,≤ |
40 |
40 |
20 |
20 | 10 |
10 |
| 5 |
Chloride（Cl），ppm,≤ |
0.5 |
0.5 |
0.2 |
0.2 | 0.03 |
0.03 |
| 6 |
Nitrate（SO3），ppm,≤ |
4 |
2 |
0.4 |
0.4 | 0.03 |
0.03 |
| 7 |
Phosphate（PO4），ppm,≤ |
2 |
1 |
0.2 |
0.2 | 0.03 |
0.03 |
| 8 |
Sulfate（SO4），ppm,≤ |
2 |
2 |
0.2 |
0.2 | 0.03 |
0.03 |
| 9 |
（Al，ppb，≤ |
500 |
100 |
10 |
1 | 0.1 |
0.01 |
| 10 | （As），ppb，≤ |
50 |
20 |
5 |
1 | 0.1 |
0.01 |
| 11 | （B），ppb，≤ | 20 | 20 | 10 | 1 | 0.1 |
0.01 |
| 12 | （Ba），ppb，≤ | 100 | 50 | 10 | - | - | 0.01 |
| 13 | （Ca），ppb，≤ |
200 |
100 |
10 |
1 | 0.1 |
0.01 |
| 14 | （Cd），ppb，≤ |
50 |
50 |
10 |
1 | - |
- |
| 15 | （Cr），ppb，≤ |
20 |
20 |
10 |
1 | 0.1 |
0.01 |
| 16 | （Cu），ppb，≤ |
20 |
20 |
10 |
1 | 0.1 |
0.01 |
| 17 | （Fe），ppb，≤ |
100 |
100 |
10 |
1 | 0.1 |
0.01 |
| 18 | （K），ppb，≤ |
200 |
100 |
10 |
1 | 0.1 |
0.01 |
| 19 | （Mg），ppb，≤ |
100 |
50 |
10 |
1 | - |
0.01 |
| 20 | （Mn），ppb，≤ |
50 |
20 |
10 |
1 | 0.1 |
0.01 |
| 21 | （Na），ppb，≤ |
500 |
100 |
10 |
1 | 0.1 |
0.01 |
| 22 | （Ni），ppb，≤ |
50 |
10 |
10 |
1 | 0.1 |
0.01 |
| 23 | （Pb），ppb，≤ |
50 |
50 |
10 |
1 | 0.1 |
0.01 |
| 24 | （Sb），ppb，≤ |
20 |
20 |
5 |
1 | 0.1 |
0.01 |
| 25 | （Sn），ppb，≤ |
50 |
50 |
10 |
1 | 0.1 |
0.01 |
| 26 | （Ti），ppb，≤ |
100 |
50 |
10 |
0.1 |
0.01 |
|
| 27 | （V），ppb，≤ |
- |
- |
10 |
1 | - |
0.01 |
| 28 | （Zn），ppb，≤ |
100 |
50 |
10 |
1 | 0.1 |
0.01 |
| 29 |
The number of particles,（μm，pcs/mL） ≤ |
- |
- |
- |
|||
Ultra-high purity electron grade hydrogen peroxide is a very important wet electronic chemical. It is mainly used as cleaning agent, etching agent and photoresist remover for integrated circuit semiconductor and silicon wafer. Impurities in products will have a fatal impact on the performance of components, and have a very important impact on the yield, electrical performance and reliability of integrated circuits. Therefore, the semiconductor industry is very strict on the purity of ultra-high purity hydrogen peroxide products. In the field of semiconductor materials, the current process of 7 nanometers of wire width and 12 inches of wafers requires hydrogen peroxide to reach a level of less than 10ppt.
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200 litre Interg drum |
IBC drum |
20-30t tank truck (lined with PFA/n-PDFE) |
This product is transported according to oxidant transport rules to prevent violent shaking;
Do not touch with hands directly. Wear plastic gloves during operation;
In case of accidental contact or package leakage, rinse with plenty of water.
